JPH0449527Y2 - - Google Patents

Info

Publication number
JPH0449527Y2
JPH0449527Y2 JP1982037209U JP3720982U JPH0449527Y2 JP H0449527 Y2 JPH0449527 Y2 JP H0449527Y2 JP 1982037209 U JP1982037209 U JP 1982037209U JP 3720982 U JP3720982 U JP 3720982U JP H0449527 Y2 JPH0449527 Y2 JP H0449527Y2
Authority
JP
Japan
Prior art keywords
pressure
air
supply pipe
air supply
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982037209U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58140403U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3720982U priority Critical patent/JPS58140403U/ja
Publication of JPS58140403U publication Critical patent/JPS58140403U/ja
Application granted granted Critical
Publication of JPH0449527Y2 publication Critical patent/JPH0449527Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
JP3720982U 1982-03-18 1982-03-18 空気マイクロメ−タ Granted JPS58140403U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3720982U JPS58140403U (ja) 1982-03-18 1982-03-18 空気マイクロメ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3720982U JPS58140403U (ja) 1982-03-18 1982-03-18 空気マイクロメ−タ

Publications (2)

Publication Number Publication Date
JPS58140403U JPS58140403U (ja) 1983-09-21
JPH0449527Y2 true JPH0449527Y2 (en]) 1992-11-20

Family

ID=30048607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3720982U Granted JPS58140403U (ja) 1982-03-18 1982-03-18 空気マイクロメ−タ

Country Status (1)

Country Link
JP (1) JPS58140403U (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2905312B2 (ja) * 1991-05-01 1999-06-14 茨城県 紙葉類の重送検出装置
JP2003007653A (ja) * 2001-06-26 2003-01-10 Disco Abrasive Syst Ltd 半導体ウェーハの分割システム及び分割方法
JP4669162B2 (ja) * 2001-06-28 2011-04-13 株式会社ディスコ 半導体ウェーハの分割システム及び分割方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924964Y2 (ja) * 1979-05-16 1984-07-23 豊田工機株式会社 エアマイクロメ−タ

Also Published As

Publication number Publication date
JPS58140403U (ja) 1983-09-21

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